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MERLIN: a device diagnosis system based on analytic models

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3 Author(s)
Freeman, G. ; IBM Corp., Hopewell Junction, NY, USA ; Lukaszek, W. ; Pan, Y.Y.C.

An approach to computer-aided interpretation of parametric test data for integrated circuit process-problem diagnosis is presented. In contrast to a conventional expert system, which reasons with a knowledge base consisting of rules acquired from human experts, the system presented centers its knowledge around analytic device equations. By using equations as the basis of the system knowledge, a more universal, well-organized, and concise level of knowledge is encoded. With the use of objects to present this knowledge, a great deal of useful information outside that described by only the symbolic expressions can be represented, and extension to qualitative or numeric models should be straightforward. The result is an expressive, well-organized, easily built, and easily maintained knowledge base. The authors describe the system's interactive graphical displays and the automatic data interpretation algorithms. Examples evaluating n-channel metal oxide semiconductor (NMOS) parameter variations, interconnect parameter variations, and interconnect yields are used for illustration

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:6 ,  Issue: 4 )