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Frequency domain (1 kHz-40 GHz) characterisation of thin films for multichip module packaging technology

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8 Author(s)
Liu, W.-T. ; Center for Integrated Electron., Rensselaer Polytech. Inst., Troy, NY, USA ; Cochrane, S. ; Wu, X.-M. ; Singh, P.K.
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Parallel plate capacitors for the broadband dielectric characterisation of both high (amorphous BaTiO3 and amorphous TaOx) and low (parylene) dielectric constant thin films were fabricated at low temperature (<200 degrees C). The dielectric constant and loss tangent were determined through the measurement of C, G and the S parameters of the capacitors. These thin film dielectrics exhibit no dispersion in the frequency range 1 kHz-40 GHz.

Published in:

Electronics Letters  (Volume:30 ,  Issue: 2 )