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Disposable blood pressure sensors with digital on-chop laser trimming

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3 Author(s)
Bryzek, J. ; NovaSensor, Fremont, CA, USA ; Mayer, R. ; Barth, P.

A monolithic silicon pressure sensor with laser-trimmable calibration networks was developed for disposable use in invasive blood pressure monitoring. Laser trimming of the novel quasidigital on-chip resistor networks brings improved performance and short trim times for high production volumes. Incorporation of a small, square diaphragm for pressure sensing provides exceptionally high overpressure capability (10000 mm Hg), while the ability to laser-trim after packaging eliminates error associated with packaged-induced stresses. The chip offers low cost and high performance and is suitable for a variety of packages.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE

Date of Conference:

6-9 June 1988