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An advanced solid state pressure transducer for high reliability SSME applications

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2 Author(s)
Gustafson, G.E. ; Honeywell Inc., Plymouth, MN, USA ; Shea, J.J.

The objective of this research project was to develop a silicon sensor and packaging technique to advance the state-of-the-art of pressure transducers for the NASA Space Shuttle main engine (SSME). This advancement is expected to yield improved reliability, accuracy, and cryogenic temperature operation. The author describes the silicon sensor, packaging concept, and the results from mechanical and electrical testing of development hardware.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE

Date of Conference:

6-9 June 1988