Mechanical properties of fine grained polysilicon-the repeatability issue

Calculation and measurements of Young's modulus, Poisson's ratio, shear modulus, and internal strain for fine-grained polysilicon as a function of processing conditions are presented. Calculations are based on appropriate averaging of single-crystal silicon properties, taking into account the film morphology. Experimental data are taken from strain diagnostic and resonant beam structures. It is found that polysilicon films can be in tension and that the intrinsic quality factor is approaching 75000.<
>