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Comparison of optical waveguide losses in silicon-on-insulator

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5 Author(s)
Zinke, T. ; Inst. fur Hochfrequenztech., Tech. Univ. Berlin, Germany ; Fischer, U. ; Splett, A. ; Schuppert, B.
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Waveguide losses in SOI (silicon-on-insulator) material fabricated by different techniques are compared thus enabling one to confirm the theoretical dependence of losses on layer thickness. Single-mode waveguide losses in BE-SOI (bond and etchback-SOI) below 0.5dB/cm are reported for waveguides with cross-sections of several square micrometres.

Published in:

Electronics Letters  (Volume:29 ,  Issue: 23 )

Date of Publication:

11 Nov. 1993

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