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Wafer fab production controls for the 90s

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3 Author(s)
Clark, C.D. ; Adv. Micro Devices, Inc., Austin, TX, USA ; Bunch, T.E. ; Dobbins, M.C.

The introduction and implementation of production control systems in wafer fabrication operations are discussed. The introduction of production planning systems and the results from the implementation of control systems placed on work-in-process inventory, equipment status, batch queuing/set-up, and statistical processing are considered

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992

Date of Conference:

30 Sep-1 Oct 1992