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An automated system for loading Atmoscan process tubes using intrabay material handling technologies

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2 Author(s)
Walsh, J. ; Digital Equipment Corp., Shrewsburg, MA, USA ; Tyra, K.P.

Summary form only given. The authors point out that a tracked robot (intrabay) system that uses adaptive hardware to reliably load conventional shovel-type cantilevers as well as the Atmoscan-type has been implemented into production. In addition, a networked VAX software package has been deployed that controls and gathers data from the furnace controller via its SECS-II interface, making the operation of the furnace and its automation completely seamless to the production end-user. The technical aspects of this automated furnace loading system are summarized. Functional design and operation of the system are presented, with particular emphasis on the proprietary tooling and software used to detect and compensate for variances in Atmoscan- and shovel-type cantilevers. The system's impact on particle reduction compared to nonautomated furnaces is also discussed. Cost savings resulting from increased efficiencies in Atmoscan tube maintenance, process consistency, automated data collection, and product/operator safety are considered

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992

Date of Conference:

30 Sep-1 Oct 1992