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Test equipment correlation: a statistical approach

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2 Author(s)
Kumar, H. ; VLSI Technol. Inc., San Jose, CA, USA ; Erjavic, S.

A technique to effectively control equipment bias is discussed. The method relies on the control of the amount residuals and its deviation. It is generic and can be easily extended to various types of testers and/or any other measurement system which is continuously being used in production environment, thus making any R&R studies very infrequent, if at all possible

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992

Date of Conference:

30 Sep-1 Oct 1992