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An integrated optic adiabatic TE/TM mode splitter on silicon

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4 Author(s)
de Ridder, R.M. ; MESA Res. Inst., Twente Univ., Enschede, Netherlands ; Sander, A.F.M. ; Driessen, A. ; Fluitman, J.H.J.

A compact integrated optic fundamental TE/TM mode splitter, based on the mode-sorting characteristics of an asymmetrical adiabatic Y junction of optical waveguides exhibiting shape birefringence, operating at 1550 nm, is designed, using the discrete sine method (DSM) and the beam propagation method (BPM). The structures are fabricated in a system of SiO2, SiOxNy, and Si3N 4 layers, using a low-temperature plasma-enhanced chemical-vapor deposition (PECVD) process, compatible with standard silicon IC processing

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Lightwave Technology, Journal of  (Volume:11 ,  Issue: 11 )