An integrated optic adiabatic TE/TM mode splitter on silicon

A compact integrated optic fundamental TE/TM mode splitter, based on the mode-sorting characteristics of an asymmetrical adiabatic Y junction of optical waveguides exhibiting shape birefringence, operating at 1550 nm, is designed, using the discrete sine method (DSM) and the beam propagation method (BPM). The structures are fabricated in a system of SiO/sub 2/, SiO/sub x/N/sub y/, and Si/sub 3/N/sub 4/ layers, using a low-temperature plasma-enhanced chemical-vapor deposition (PECVD) process, compatible with standard silicon IC processing.<
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