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Silica-based optical waveguide on terraced silicon substrate as hybrid integration platform

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5 Author(s)
Yamada, Y. ; NTT Opto-electro. Labs., Ibaraki, Japan ; Takagi, A. ; Ogawa, I. ; Kawachi, M.
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A silica-based optical waveguide on a silicon substrate with terrace regions is proposed. Because the substrate is equipped with a low-loss waveguide and an optical bench at the same time, it is applicable to a hybrid integration platform.

Published in:

Electronics Letters  (Volume:29 ,  Issue: 5 )