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A fast, general three-dimensional device simulator and its application in a submicron EPROM design study

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2 Author(s)
T. D. Linton ; Microelectron. & Comput. Technol. Corp., Austin, TX, USA ; P. A. Blakey

The implementation, functionality, and use of MAGENTA, a three-dimensional semiconductor device simulator. Version 1.0 of the program solves the nonlinear Poisson equation. The program possesses the attributes of numerical efficiency, structural generality, and ease of use required to be an effective general-purpose CAD (computer-aided design) tool. The utility of MAGENTA is demonstrated in a study of EPROM (erasable programmable read-only memory) design issues. Strong three-dimensional effects which impact threshold voltage, programming characteristics, and cell capacitances are characterized. Implications of these effects for submicrometer EPROM design are discussed

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IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems  (Volume:8 ,  Issue: 5 )