By Topic

Optical pressure sensor based on a Mach-Zehnder interferometer integrated with a lateral a-Si:H p-i-n photodiode

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
C. Wagner ; DASA, Munchen, Germany ; J. Frankenberger ; P. P. Deimel

We have fabricated an optical pressure sensor consisting of a Mach-Zehnder (MZ) interferometer and a thin membrane anisotropically etched into the silicon substrate underneath the measuring arm of the interferometer. The oxynitride rib-waveguides are single mode both for the TE and the TM polarization. To measure the constructive and destructive interferences at the output section of the interferometer we have integrated the rib waveguide with a lateral a-Si:H p-i-n photodiode. The number of constructive interferences measured for a given membrane deflection differs depending on TE or TM polarization.<>

Published in:

IEEE Photonics Technology Letters  (Volume:5 ,  Issue: 10 )