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Dynamics of a collisional, capacitive RF sheath

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1 Author(s)
Lieberman, M.A. ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

A self-consistent solution for the dynamics of a high-voltage, capacitive RF sheath driven by a sinusoidal current source is obtained, under the assumptions of time-independent, collisional ion motion and inertialess electrons. Values of the ion current density, the sheath capacitance per unit area for the fundamental voltage harmonic, and the conductance per unit area for stochastic heating by the oscillating sheath are calculated. The ratio of the DC to the peak value of the oscillating voltage is found to be 0.40, while the second and third voltage harmonics are, respectively, 19.3% and 5.3% of the fundamental

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Plasma Science, IEEE Transactions on  (Volume:17 ,  Issue: 2 )