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Mirrors on a chip

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1 Author(s)
Younse, J.M. ; Texas Instruments Inc., Dallas, TX, USA

The design, development, and performance of the digital micromirror device (DMD), a spatial light modulator for projection displays, are examined. The DMD covers each memory cell of a CMOS static RAM with a movable micromirror. Electrostatic forces contingent on the data in the cell tilt the mirror either on or off, modulating the light incident on its surface. Light reflected from any on-mirrors passes through a projection lens and creates images on a large screen. Light from the remaining off-mirrors is reflected away from the projection lens and trapped. The standard-resolution version of the DMD corresponds to the National Television System Committee (NTSC) or Phase Alternation Line (PAL) standard. It is a chip about 2.3 cm/sup 2/ covered by 442368 movable mirrors, each 16 mu m on a side.<>

Published in:

Spectrum, IEEE  (Volume:30 ,  Issue: 11 )

Date of Publication:

Nov. 1993

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