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A new grid-generation method for 2-D simulation of devices with nonplanar semiconductor surface

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2 Author(s)
Chin, S.-P. ; Adv. Semicond. Device Res. Lab., Nat. Chiao-Tung Univ., Hsinchu, Taiwan ; Ching-Yuan Wu, Ph.D.

A general analytical method is proposed for transforming a 2-D multilayer physical domain with the nonplanar semiconductor surface into a 2-D rectangular mathematical domain with a planar surface, with a set of Fourier series being used to describe a general conformal mapping for each layer. Based on the method, a simple iteration algorithm, which incorporates a nonlinear Jacobian-iteration method with the fast Fourier transform (FFT), is developed to solve the system of nonlinear equations due to the mutually coupled boundary conditions. As a result of the analytical conformal mapping, a regular, deformable grid structure can be applied to simulate the device structure with the nonplanar semiconductor surface, and the device simulator using the conventional rectangle-based grid can be easily modified to simulate the device with the nonplanar semiconductor surface

Published in:

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:12 ,  Issue: 9 )

Date of Publication:

Sep 1993

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