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A novel laser direct write technique for fabrication of thin film MICs

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3 Author(s)
Harish, C.M. ; Indian Telephone Ind. Ltd., Bangalore, India ; Kumar, V. ; Prabhakar, A.

A technique for fabrication of thin-film circuits for microwave integrated circuit (MIC) application is presented. This low-cost fabrication technique utilizes laser direct write of copper patterns on alumina substrates. The method obviates the need for photomasks and photolithography. The film deposition mechanism, deposit film analysis, and MIC fabrication sequence are presented. Performance evaluation of MICs fabricated using this technique is also included

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:6 ,  Issue: 3 )