An improved analytical LDD (lightly doped drain)-MOSFET model for digital and analog circuit simulation in the deep-submicron region is described. This model includes all short and narrow channel effects and a substrate current model. Special emphasis was placed on the voltage-dependent effective channel length and series resistance of LDD devices. The voltage-dependent channel length and series resistance of LDD devices are measured electrically, verified with capacitance measurements, and introduced into the model.<
Published in:
Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International
Date of Conference: 8-11 Dec. 1991