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A 3-D BPSG flow simulation with temperature and impurity concentration dependent viscosity model

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3 Author(s)
Umimoto, H. ; Matsushita Electric Industrial Co. Ltd., Osaka, Japan ; Odanaka, S. ; Imai, S.

A BPSG flow simulation with a newly developed viscosity model is described. The viscosity model allows a 3-D BPSG flow simulation in a wide range of flow temperature and impurity concentration in the BPSG. STM observation and 3-D BPSG flow simulation using this viscosity model reveal a significant difference in the flow behavior at 850 degrees C and at 900 degrees C. The temperature dependence of the 3-D BPSG flow behavior is clarified. It is found that the 3-D BPSG flow behavior is characterized by universal curves of the surface height using the viscosity model.<>

Published in:

Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International

Date of Conference:

8-11 Dec. 1991