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A comparison of RF electrode sheath models

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3 Author(s)
Godyak, V.A. ; OSRAM-Sylvania Inc., Danvers, MA, USA ; Peijak, R.B. ; Sternberg, N.

Analytic expressions have been found from different time-averaged and dynamic models for the electrode sheath width in a capacitively driven RF discharge. The sheath widths predicted from all the models under consideration are shown to practically coincide if they are expressed in terms of DC sheath voltage and ion current to the RF electrode. However, these models have fundamental differences in their RF discharge scaling laws that result in different theoretical predictions for RF discharge electrical characteristics. Analytic expressions for the sheath width with arbitrary collisionality at moderate RF voltages are found to be in good agreement with experimental measurements made over a wide range of discharge voltage and gas pressure

Published in:

Plasma Science, IEEE Transactions on  (Volume:21 ,  Issue: 4 )

Date of Publication:

Aug 1993

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