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Analysis of slow-wave transmission lines on multi-layered semiconductor structures including conductor loss

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2 Author(s)
Liou, J.-C. ; Dept. of Electr. & Comput. Eng., Massachusetts Univ., Amherst, MA, USA ; Kei May Lau

Metal lines on semiconductor devices and circuits sometimes show slow-wave phenomena. To determine signal transmission characteristics along the lines, the typical assumption that metal is perfectly conducting is not always valid. A simple and accurate means is used here to include metallic loss in spectral domain analysis of planar transmission lines built on multilayer semiconducting media. Experimental results with a modulation-doped field-effect transistor (MODFET) structure and comparison with the calculations are presented

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:41 ,  Issue: 5 )