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A tactile sensor for the determination of object positions

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3 Author(s)
Choi, W.-s. ; Dept. of Electr. Eng., Boston Univ., MA, USA ; Smits, J.G. ; Woodruff, G.W.

A tactile sensor has been designed and fabricated for fast and accurate determination of object positions. The sensor is a cantilever beam on which a piezoelectric heterogeneous bimorph and a piezoelectric strain sensor are integrated. Deflection measurements of the bimorph have shown that the bender has a square dependence on the amplitude of the voltage. Deflections as large as 1166 μm at -6 V were registered for a 2980-μm-long bimorph. The apparent d31 under a bias of 4 V was 108×10-12 m/V. The large magnitude of deflection was the result of enhanced piezoelectric effect under strong static field

Published in:

Ultrasonics Symposium, 1991. Proceedings., IEEE 1991

Date of Conference:

8-11 Dec 1991