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E-beam-induced fabrication of microstructures

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2 Author(s)
W. H. Brunger ; Fraunhofer-Inst. fur Siliziumtechnologie, Berlin, Germany ; K. T. Kohlmann

E-beam-induced deposition of tungsten, W, from a metal-organic gas has been used for the formation of microstructures of various geometries. Three examples have been selected for demonstration: line deposition, needle growth, and bridge formation. Important parameters of the W deposition process from W(CO)6 gas are given, among them minimum feature size, positional accuracy, and growth rate

Published in:

Journal of Microelectromechanical Systems  (Volume:2 ,  Issue: 1 )