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Infinitesimal machinery

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1 Author(s)
Feynman, R. ; California Inst. of Technol., Pasadena, CA, USA

The author discusses the sacrificial-layer method of making silicon micromotors, the use of electrostatic actuation, and the importance of friction and contact sticking in such devices. The persistent problem of finding meaningful applications for these tiny machines is discussed, touching a range of topics along the way. The future of computation using a register made of atoms, and quantum-mechanical transitions for computation operations, is looked at

Published in:

Microelectromechanical Systems, Journal of  (Volume:2 ,  Issue: 1 )

Date of Publication:

Mar 1993

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