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Anisotropic stress in window-plated Permalloy thin films

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1 Author(s)
Ross, C.A. ; Komag Inc., Milpitas, CA, USA

Measurements of stress have been made in window-plated strips of Permalloy with different aspect ratios and the results have been related to finite-element simulations. It is found that the in-plane stresses in the window-plated strips are similar to those expected in strips fabricated from a sheet film with an initial biaxial stress state. The effect of annealing the strips is to increase the difference between the two principle in-plane stresses. The implications of this stress state for the magnetic anisotropy of the strips is discussed

Published in:

Magnetics, IEEE Transactions on  (Volume:29 ,  Issue: 5 )

Date of Publication:

Sep 1993

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