Referenced Items are not available for this document.
The vector theory is developed and employed to calculate 1-D aerial images by numerically solving Maxwell's equations to account for the scattering effect from realistic mask structures. Comparisons of results from the scalar and vector theories are made for conventional chrome mask and various phase shifting masks to show the differences of these two theories
Published in:
Electron Devices, IEEE Transactions on
(Volume:40
,
Issue:
9
)
Date of Publication: Sep 1993
- Page(s):
- 1604 - 1613
- ISSN :
- 0018-9383
- INSPEC Accession Number:
- 4520672
- Digital Object Identifier :
- 10.1109/16.231565
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Sep 1993
- Sponsored by :
- IEEE Electron Devices Society
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