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Integrated uncooled infrared detector imaging arrays

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3 Author(s)
Wood, R.A. ; Honeywell Inc., Sensor & System Dev. Center, Bloomington, MN, USA ; Han, C.J. ; Kruse, P.W.

The authors describe a new type of infrared (IR) focal plane consisting of a 2-D array of microminiature bolometers (microbolometers) fabricated, complete with readout electronics, as a monolithic silicon chip. These focal planes require no cooling for sensitive detection of IR radiation. The authors report high-quality IR imaging obtained with such focal planes.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Date of Conference:

22-25 June 1992

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