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Base driven micromechanical resonators

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4 Author(s)
Bouwstra, S. ; MESA Res. Unit, Twente Univ., Enschede, Netherlands ; Tilmans, H.A.C. ; Selvakumar, A. ; Najafi, K.

A novel approach for excitation and detection of micromechanical structures is presented, which makes use of base drive. Test samples for translating base drive make use of piezoelectric excitation and detection, while test samples for bending base drive make use of thermal excitation and piezoresistive detection. Both alternatives are modeled and tested.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Date of Conference:

22-25 June 1992