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A vertical Hall magnetic field sensor using CMOS-compatible micromachining techniques

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3 Author(s)
M. Paranjape ; Alberta Univ., Edmonton, Alta., Canada ; Lj. Ristic ; W. Allegretto

A novel magnetic field sensor for two-dimensional detection of magnetic fields has been simulated, designed, manufactured, and tested. The device is made as a vertical Hall structure comprised of two pairs of current contacts for the detection of two orthogonal components of magnetic field. The uniqueness of this sensor is that it employs a bulk micromachining technique as a post processing step to accomplish the confinement of electron flow in the desired directions. The experimental results and simulations are in good agreement. The combination of bulk micromachining and CMOS processing has led to favourable results for the sensor.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Date of Conference:

22-25 June 1992