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The Hummingbird minipositioner-providing three-axis motion at 50 g's with low reactions

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7 Author(s)
Karidis, J.P. ; IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA ; McVicker, G. ; Pawletko, J.P. ; Zai, L.C.
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The Hummingbird minipositioner is a three-axis servo-mechanism designed to provide fast and accurate positioning of a low-mass probe tip on or above a nearly planar object. Peak XYZ accelerations in excess of 500 m/s2 (50 g) are obtained, with positioning resolution under 1 μm and a workspace of 13 by 13 by 1 mm. The system weighs 950 g and is nearly reactionless during X-Y motion to simplify integration with large-area positioners. The design of the dynamically balanced five-bar linkage assembly and the Z-actuator is presented, along with data on in-plane linkage resonances (shown to be >1 kHz) and the torque cancellation effectiveness. A typical incremental move of 5 mm with 50 g peak acceleration and a move time of 8 ms is also presented

Published in:

Robotics and Automation, 1992. Proceedings., 1992 IEEE International Conference on

Date of Conference:

12-14 May 1992