Demonstration of a waveguide lens monolithically integrated with a laser diode by compositional disordering of a quantum well

An elliptic waveguide lens that is monolithically integrated with a GaAs/AlGaAs distributed feedback laser diode and a grating output coupler by electron beam lithography, ion implantation, and two-step metalorganic vapor phase epitaxy is described. The waveguide lens is formed by the etching of a patterning layer to ensure that the fabrication process of the waveguide lens is compatible with that of the laser diode. Collimated output light is directly obtained from a semiconductor substrate using this waveguide lens and a grating output coupler.<
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