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Demonstration of a waveguide lens monolithically integrated with a laser diode by compositional disordering of a quantum well

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5 Author(s)
T. Hirata ; Yokogawa Electr. Corp., Tokyo, Japan ; M. Suehiro ; M. Hihara ; M. Dobashi
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An elliptic waveguide lens that is monolithically integrated with a GaAs/AlGaAs distributed feedback laser diode and a grating output coupler by electron beam lithography, ion implantation, and two-step metalorganic vapor phase epitaxy is described. The waveguide lens is formed by the etching of a patterning layer to ensure that the fabrication process of the waveguide lens is compatible with that of the laser diode. Collimated output light is directly obtained from a semiconductor substrate using this waveguide lens and a grating output coupler.<>

Published in:

IEEE Photonics Technology Letters  (Volume:5 ,  Issue: 6 )