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Depth profiling by phase shift detection in scanning electron-acoustic microscopy

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2 Author(s)
Marty-Dessus, D. ; Lab. d'Opt. Electron., CNRS, Toulouse, France ; Franceschi, J.L.

A method of depth profiling in an object is presented. A modulated electron beam produces acoustic waves which are detected by a piezoelectric sensor. An adapted treatment of the transmitted signal enables cuts to be obtained at different depths within the sample.

Published in:

Electronics Letters  (Volume:29 ,  Issue: 10 )

Date of Publication:

13 May 1993

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