The monolithic integration of a strained layer InGaAs-GaAs-AlGaAs quantum-well laser with a passive waveguide by conventional atmospheric pressure metalorganic chemical vapor growth is discussed. Growth inhibition from a silicon dioxide mask is the mechanism used for selective-area growth rate enhancement. Variation in the width of the oxide stripe opening along the length of the device results in different quantum-well thicknesses, allowing the light generated in one selective growth region to propagate without significant absorption loss in an adjacent passive waveguide region.<
Published in:
Photonics Technology Letters, IEEE
(Volume:5
,
Issue:
4
)
Date of Publication: April 1993