The optical performance of a logical optical detector, that has been developed from a thin-oxide MIS silicon switch, is considered in relation to its fabrication. The analysis accounts for quantum efficiency and absorption depth. Predicted and measured results, taking these into account, show a very good correspondence. Applications include bistable switching sensors, pyroelectric detection, and robotic control systems. Since only standard processing is required, the construction of the device can be directed toward a wide range of requirements
Published in:
Electron Devices, IEEE Transactions on
(Volume:36
,
Issue:
1
)
Date of Publication: Jan 1989