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Browse Journals & Magazines > Nuclear Science, IEEE Transac ...> Volume:39 Issue:6 Help

Evidence for a deep electron trap and charge compensation in separation by implanted oxygen oxides

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3 Author(s)
Conley, J.F. ; Pennsylvania State Univ., University Park, PA, USA ; Lenahan, P.M. ; Roitman, P.

The authors present direct evidence for the creation of deep electron traps in SIMOX (separation by implantation of oxygen) buried oxides. In addition, they present combined electrical and electron spin resonance evidence which demonstrates that at least some positively charged paramagnetic E' centers are compensated by negatively charged centers. Finally, they present evidence which strongly suggests that a substantial fraction of the deep electron traps are coupled to E' centers

Published in:
Nuclear Science, IEEE Transactions on  (Volume:39 ,  Issue: 6 )

Date of Publication: Dec 1992

Page(s):
2114 - 2120
ISSN :
0018-9499
INSPEC Accession Number:
4404774
Digital Object Identifier :
10.1109/23.211410
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
Dec 1992
Sponsored by :
IEEE Nuclear and Plasma Sciences Society

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