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Gate size dependence of the radiation-produced changes in threshold voltage, mobility, and interface state density in bulk CMOS

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5 Author(s)
Scarpulla, J. ; Aerospace Corp., Los Angeles, CA, USA ; Amram, A.L. ; Gin, V.W. ; Morse, T.C.
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It has been observed that radiation-induced threshold voltage shifts, interface trap densities, and channel mobility reductions are dependent on the drawn or coded geometrical sizes of transistors in one radiation-hardened VLSI CMOS technology. In another technology, no such dependencies were found. The authors suggest physical mechanisms responsible for the observed size dependencies, and warn that large-area transistors and capacitors for total dose evaluations may not always be suitable. Stress measurements indicate that the radiation-induced changes are correlated with higher tensile stress levels

Published in:
Nuclear Science, IEEE Transactions on  (Volume:39 ,  Issue: 6 )

Date of Publication: Dec 1992

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