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Pressure transducer with Au-Ni thin-film strain gauges

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5 Author(s)
Rajanna, K. ; Instrum. & Services Unit, Indian Inst. of Sci., Bangalore, India ; Mohan, S. ; Nayak, M.M. ; Gunasekaran, N.
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The behavior of a pressure transducer with Au-Ni (89:11) film as strain gauges has been studied. The effects of postdeposition heat treatment on the resistance of the thin-film strain gauges and hence the output performance of the pressure transducer are discussed. The effect of a repeated number of pressure cycles carried out over a period of eight months has also been reported. The maximum nonlinearity and the hysteresis is improved from 0.92% FSO to 0.06% FSO after 1000 pressure cycles. The output behavior of the pressure transducer with temperature has also been studied

Published in:

Electron Devices, IEEE Transactions on  (Volume:40 ,  Issue: 3 )

Date of Publication:

Mar 1993

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