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Regrowth-free waveguide-integrated photodetector with efficient total-internal-reflection coupling

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4 Author(s)
Bossi, D.E. ; United Technologies Res. Center, East Hartford, CT, USA ; Ade, R.W. ; Basilica, R.P. ; Berak, J.M.

A novel technique utilizing an etched total-internal-reflection mirror for vertical waveguide-to-photodetector coupling is described. An 83% quantum efficiency and 5-GHz bandwidth are achieved at lambda =0.84 mu in a GaAs MSM photodetector illuminated by a low-loss (0.5 dB/cm) AlGaAs double-heterostructure (DH) waveguide. A significant advantage of total-internal-reflection coupling is its compatibility with the integration of low-loss active DH waveguide components without requiring epitaxial regrowth. This coupling technique is independent of both optical wavelength and polarization, and permits efficient waveguide coupling to extremely small-area photodetectors.<>

Published in:

Photonics Technology Letters, IEEE  (Volume:5 ,  Issue: 2 )