By Topic

Thermoelectric AC power sensor by CMOS technology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Jaeggi, D. ; Phys. Electron. Lab., Inst. of Quantum Electron., Zurich, Switzerland ; Baltes, H. ; Moser, D.

The authors report the development of a thermoelectric AC power sensor (thermoconverter) realized by industrial CMOS IC technology in combination with postprocessing micromachining. The sensor is based on a polysilicon heating resistor and a polysilicon/aluminum thermopile integrated on an oxide microbridge. The thermopile sensitivity is 9.9 mV/mW and the burn-out power of the sensor is 50 mW. The time constant is 1.85 ms and the SNR (signal-to-noise ratio) is 8*10/sup 9//W. The linearity error with respect to frequency is less than 0.1% below 400 MHz and less than 1% up to 1.2 GHz.<>

Published in:

Electron Device Letters, IEEE  (Volume:13 ,  Issue: 7 )