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Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels [dimension measurement]

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3 Author(s)
Tanaka, Mitsuru ; Nat. Res. Lab. of Metrol., Ysukuba, Japan ; Yamagami, T. ; Nakayama, Kan

Heterodyne laser interferometry and its accuracy at subnanometer levels are discussed. The simplest optical nonpolarization heterodyne interferometer is tested experimentally to understand and reduce fringe distortion. An accuracy of 0.1 nm for the 633-nm He-Ne laser interferometer is achieved

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:38 ,  Issue: 2 )

Date of Publication:

Apr 1989

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