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Changes of surface-acoustic-wave velocity on Z-cut LiTaO3 substrate by proton exchange and post-exchange annealing

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3 Author(s)
Hano, K. ; Dept. of Electr. Eng., Kyushu Inst. of Technol., Japan ; Chubachi, N. ; Sannomiya, T.

The velocity of leaky surface-acoustic-waves (LSAWs) on proton-exchanged and annealed proton-exchanged Z-cut LiTaO3 substrates was measured by line-focus-beam (LFB) acoustic microscopy. It is revealed that the LSAW velocity is decreased from 3220 to 3000 m/s by proton exchange and that post-exchange annealing effects some recovery to the decreased velocity.

Published in:
Electronics Letters  (Volume:28 ,  Issue: 25 )

Date of Publication: 3 Dec. 1992

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