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Simple two-dimensional numerical solution method for SAW-semiconductor device simulations

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2 Author(s)
Haartsen, J.C. ; Delft Univ. of Technol., Netherlands ; Venema, A.

A computational technique to determine the electrical properties of SAW-semiconductor devices is presented. The contribution of the acoustic waves is reduced to a surface charge at the interface between the piezoelectric layer and the semiconducting substrate. In this way the electrical problem can be solved with numerical techniques commonly used for device modelling.

Published in:

Electronics Letters  (Volume:25 ,  Issue: 7 )