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Wet etching of proton-exchanged lithium niobate-a novel processing technique

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4 Author(s)
F. Laurell ; Inst. of Opt. Res., Stockholm, Sweden ; J. Webjorn ; G. Arvidsson ; J. Holmberg

A novel and simple method to etch lithium niobate is reported. It was found that proton exchanged areas on the c+-face of the crystal can be etched away using a mixture of HF:HNO3 while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures

Published in:

Journal of Lightwave Technology  (Volume:10 ,  Issue: 11 )