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4 Author(s)

The rapid development of IC-technology has strongly stimulated the fabrication of (bio)chemical sensors based on solid-state devices. Principally, such (bio)chemical sensors consist of a (bio)chemically sensitive membrane combined with a signal transducing solid-state chip. It has appeared that a crucial point in the development of such sensors is the well-controlled and reproducible deposition of the sensitive membranes on the underlying structure. Therefore, the authors have developed different techniques to deposit and pattern polymeric membranes on whole wafers. In this way not only a reproducible membrane deposition is obtained, but also the advantages of bathwise production are maintained. ISFET based devices and amperometric sensors are examined

Published in:

Biosensors: A Viable Monitoring Technology? IEE Colloquium on

Date of Conference:

7 Oct 1991