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Magnetic property and microstructure dependence of CoCrTa/Cr media on substrate temperature and bias

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5 Author(s)
Duan, Shanlin ; Seagate Magnetics, Fremont, CA, USA ; Khan, Mahbub R. ; Haefele, J.E. ; Tang, Li
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Thin CoCrTa/Cr films were deposited at different substrate temperature Ts and substrate biasing voltage V b. The in-plane coercivity increased significantly with TS and Vb. Coercive squareness and orientation ratio also increased with Ts and Vb. Transmission electron microscopy (TEM) results indicated that, at low Ts, the magnetic film had an isolated-grain structure, with smaller sub-grain structure within each grain. At high Ts, the magnetic film had a closely packed grain structure, probably due to the enhanced adatom mobility; the grain size was much larger and striations were observed in many grains. The application of a negative biasing voltage to the substrate also tended to reduce the grain isolation. At high Ts, it seems that biasing also reduced the number of grains with striations. Scanning electron microscopy (SEM) results indicated that, with increasing Ts and V b, more high-frequency texture line appeared in the magnetic layer, which was likely related to the increase of orientation ratio and squareness with increasing Ts and Vb

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Magnetics, IEEE Transactions on  (Volume:28 ,  Issue: 5 )