Cart (Loading....) | Create Account
Close category search window
 

High-accuracy characterization of titanium films for LiNbO/sub 3/ guided wave devices by optical densitometry

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Meneghini, G. ; Centro Studi e Lab. Telecommun. SpA, Turin, Italy ; Meliga, M. ; De Bernardi, C. ; Morasca, S.
more authors

An experimental study of optical densitometry as a technique for accurate determination of Ti film thickness for integrated optical devices on LiNbO/sub 3/ is discussed. Densitometric data, obtained with a simple instrument for photographic applications, are compared to conventional stylus profilometric measurements and to microgravimetric and Rutherford backscatter measurements; excellent linearity and a sensitivity of about 3 AA are evidenced, as well as capability of absolute calibration in terms of metal atoms per unit surface area, over the entire range of Ti thickness commonly used in integrated optics. The possibility of using this very simple, rapid, and nondestructive method for systematic sample testing, online deposition monitoring, and utilizing optimum coating area is also presented.<>

Published in:

Lightwave Technology, Journal of  (Volume:7 ,  Issue: 2 )

Date of Publication:

Feb. 1989

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.