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THz Waveguide Mixers With NbTiN HEBs on Silicon Nitride Membranes

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6 Author(s)
Munoz, P.P. ; I Phys. Inst., Koln Univ. ; Bedorf, S. ; Brandt, M. ; Tils, T.
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We describe the design and performance of waveguide mixers at 1.4 THz and 1.9 THz based on NbTiN phonon-cooled hot electron bolometers (HEBs) fabricated on a 2-mum thick Si3N4 membrane. The membrane is bonded to a silicon frame in the mixer block using a flip chip process. Simulated RF coupling is compared with experimental results, showing good agreement. Receiver noise temperature measurements show uncorrected values of 1600 K at 1.4 THz and 2100 K at 1.9 THz, both at 1.5GHz intermediate frequency. Device cooling on the membrane seems not to be problematic. The mixers are used in receivers for the Stratospheric Observatory for Infrared Astronomy (SOFIA) [German REceiver At THz frequencies (GREAT)] and the Atacama path finder experiment (APEX) [CO, N+, deuterium observations receiver (CONDOR)]

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Microwave and Wireless Components Letters, IEEE  (Volume:16 ,  Issue: 11 )