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Accurate Modelling of Average Phosphorus Diffusivities in Germanium after Long Thermal Anneals

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2 Author(s)
M. Carroll ; Sandia National Laboratories, P.O. Box 5800, M. S. 1077, Albuquerque, NM, 87185, USA. Phone: 1-505-284-3499 E-mail: ; R. Koudelka

In summary, phosphorus diffusivities in germanium were measured after long anneals at temperatures between 600degC and 800degC. The diffusivities are extrinsic (i.e., D ~ (n/ni)2) but are slower than recently reported extrinsic diffusivities and a slightly larger activation energy is also measured in this work than the previous work. Using a diffusion model that includes a segregation term between the cap oxide and the germanium combined with a peak solid solubility of 3times1019 cm-3 good fits to the experimental profiles were obtained

Published in:

2006 International SiGe Technology and Device Meeting

Date of Conference:

15-17 May 2006