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The following topics are dealt with: strained Si FET/CMOS and technology; germanium device technology; optoelectronics and Ge FETs; Ge MIS/MOS technology; selective epitaxy; heterostructure growth; quantum devices; virtual substrates; heterojunction bipolar transistors; semiconductor process technology

Published in:

SiGe Technology and Device Meeting, 2006. ISTDM 2006. Third International

Date of Conference:

15-17 May 2006

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