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Performance of RF MEMS switches at low temperatures

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8 Author(s)
H. T. Su ; Sch. of Eng., Swinburne Univ. of Technol. ; I. Llamas-Garro ; M. J. Lancaster ; M. Prest
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The actuation voltage of microelectromechanical system (MEMS) metal switches was investigated at temperatures ranging from 10 to 290 K. The investigation shows a 50% increase in the actuation voltage at low temperature. A comparison has been made using a published model and showed similar increment of actuation voltage at low temperature

Published in:

Electronics Letters  (Volume:42 ,  Issue: 21 )